Thiết bị xử lý nhiệt độ trong sản xuất chất bán dẫn DF1600 Ohkura

This apparatus is a vertical heat treatment furnace (diffusion furnace) used for heat treatment processes in semiconductor manufacturing processes. The semiconductor manufacturing field is currently undergoing a change from mass production to production of various product types in small quantities. This apparatus allows small-capacity, high-speed treatment, while having a size that makes it possible to install in existing clean rooms.

Thiết bị xử lý nhiệt độ trong sản xuất chất bán dẫn DF1600 Ohkura