Thiết bị điều khiển lưu lượng MF5100B, MF5141B, MF5142B, MF5143B Ohkura

THE MODEL MF5100B MASS FLOW CONTROLLER FEATURES EXTENDED CAPABILITY OF RANGES UP TO 400 SLM, HIGHER TERMPERATURE STABILITY AND MANY FUNCTIONS.

Features

■ MINIMUN RANGE OF 5 SCCM & UP TO 400 SLM
„„■COMPACT SIZE
„■„ STANDARD SOFT-START FUNCTION
„„■MINIMUM LEAKAGE OF 1.013 × 10-10Pa·m3/s (He)

Bộ điều khiển lưu lượng MF5100B, MF5141B, MF5142B, MF5143B Ohkura